| COIL用薄膜90°位相延迟高反射镜的研制 |
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| 引用本文： | 李刚,公发全,刘万发,孙龙,孙连春.COIL用薄膜90°位相延迟高反射镜的研制[J].强激光与粒子束,2005,17(2):161-163. |
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| 作者姓名： | 李刚 公发全 刘万发 孙龙 孙连春 |
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| 作者单位： | 1.中国科学院 大连化学物理研究所,辽宁 大连 1 1 6023; |
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| 基金项目： | 国家自然科学基金资助项目(1047409) |
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| 摘 要： | 随着氧碘化学激光器（COIL）输出功率的不断提高，传统的膜系设计已不能满足要求。在倍频膜系的设计基础上，优化设计出了激光45°入射时对1 315 nm和632.8 nm双波长高反（HR）并在1 315 nm处具有90°位相延迟的高反射镜，其基底材料为融石英，高折射率材料为ZrO2, 低折射率材料为SiO2。然后，采用电子束蒸发手段制备了口径为200 mm的高反射位相延迟镜。最后对该延迟镜的性能进行了测试，结果表明:对632.8 nm波长的反射率大于等于95.0%，对1 315 nm波长的反射率大于等于99.8%,位相延迟在90.235°～95.586°范围内。
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| 关 键 词： | 氧碘化学激光器 位相延迟 倍频膜系 |
| 文章编号： | 1001-4322(2005)02-0161-03 |
| 收稿时间： | 2004/6/30 |
| 修稿时间： | 2004年6月30日 |
Fabrication of HR mirror with 90°phase retardance in COIL resonator |
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| LI Gang,GONG Fa-quan,LIU Wan-fa,SUN Long,SUN Lian-chun.Fabrication of HR mirror with 90°phase retardance in COIL resonator[J].High Power Laser and Particle Beams,2005,17(2):161-163. |
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| Authors: | LI Gang GONG Fa-quan LIU Wan-fa SUN Long SUN Lian-chun |
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| Institution: | 1.Dalian Institute of Chemical Physics,Chinese Academy of Sciences,P.O.Box 110-7,Dalian 116023,China;2.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130022,China |
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| Abstract: | With the continuous increase of COIL output power, the conventional HR film stack gradually can't satisfy the practical requirements. In this paper, on the base of multiple frequency film stack, a 200 mm HR phase retardance mirror at 45° incidence is designed and fabricated by e-beam evaporation equipment. The substrate is fused silica, and the high and low refractive index materials are ZrO2 and SiO1 respectively. The measured results show that the reflectivity at 632.8 nm is no less than 95.0%, the reflectivity at 1 315 nm is no less than 99.8%, and phase retardance at 1 315 nm is 90.235°～95.586°. |
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| Keywords: | COIL Phase retardance Multiple frequency film stacks |
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