多辊轧机冷轧技术在靶材料制备中的应用

 叙述了多辊轧机轧制金属薄膜原理，以Ti膜制备为例，借助多辊轧机冷轧技术进行1.5 μm厚钛薄带的制备工艺研究。对薄膜的特性测试结果表明：工作辊的表面粗糙度对于轧制薄膜的表面粗糙度的影响很大，降低工作辊表面的粗糙度可以得到粗糙度为25.2 nm的金属薄膜。

Application of multi-high cold-rolling mill in the target materials fabrication

Principles of cold rolling with multi-high cold-rolling mill are introduced in this text and Titanium film with thickness less than 1.5 μm has been made with the 32-high cold-rollin mill. The roughness of the rolled film is closely associated with the roughness of the work roller. Thin film with roughness of 25.2 nm has been made with the roughness lower of the work roller. The technology of cold-rolling with multi-roller mill has been used in the fabrication of target materials as Cu, Al, etc.