| 分层蒸镀制备聚酰亚胺自支撑膜及其特性研究 |
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| 引用本文： | 戚同非,吴永刚,王勇,张莉,林小燕,田国勋,焦宏飞,陈玲燕.分层蒸镀制备聚酰亚胺自支撑膜及其特性研究[J].强激光与粒子束,2005,17(10):1528-1532. |
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| 作者姓名： | 戚同非 吴永刚 王勇 张莉 林小燕 田国勋 焦宏飞 陈玲燕 |
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| 作者单位： | 同济大学 波耳固体物理研究所， 精密光学工程技术研究所， 上海 200092 |
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| 基金项目： | 国家863计划项目资助课题;国家自然科学基金资助课题（10576021） |
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| 摘 要： | 采用分层蒸镀法，在玻璃基片上依次蒸镀二氨基二苯醚（ODA）和均苯四甲酸二酐（PMDA）两种单体，然后在空气环境中对样品进行不同温度和时间的热亚胺化处理，使二者在交界面上反应生成聚酰亚胺。经加热150 ℃ 1 h然后经350 ℃ 2 h处理的样品，在脱膜后能制备出直径1.8 cm，厚度为100 nm的聚酰亚胺自支撑薄膜。用FTIR测量了自支撑薄膜的红外光谱，特征吸收峰的分析表明薄膜已基本上完全亚胺化。用原子力显微镜分析了浮法玻璃衬底上聚酰亚胺薄膜的表面形貌，结果表明以ODA作为内层制备的膜层表面更光滑平整。
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| 关 键 词： | 层蒸镀 单体 聚酰亚胺 自支撑膜 表面形貌 |
| 文章编号： | 1001-4322(2005)10-1528-05 |
| 收稿时间： | 2005-01-31 |
| 修稿时间： | 2005-06-23 |
Preparation of ultra-thin freestanding polyimide films with sequential evaporation technique |
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| QI Tong-fei,WU Yong-gang,WANG Yong,ZHANG Li,LIN Xiao-yan,TIAN Guo-xun,JIAO Hong-fei,CHEN Ling-yan.Preparation of ultra-thin freestanding polyimide films with sequential evaporation technique[J].High Power Laser and Particle Beams,2005,17(10):1528-1532. |
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| Authors: | QI Tong-fei WU Yong-gang WANG Yong ZHANG Li LIN Xiao-yan TIAN Guo-xun JIAO Hong-fei CHEN Ling-yan |
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| Institution: | Pohl Institute of Solid State Physics, Institute of Precise Optical Engineering and Technology, Tongji University, Shanghai 200092, China |
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| Abstract: | Ultra-thin freestanding polyimide(PI) films of 100 nm thickness were formed by sequential evaporation of 4,4'-diaminodiphenyl ether(ODA) and pyromellitic dianhydride(PMDA) precursor monomers followed by a thermal treatment of 150 ℃ 1 h and 350 ℃ 2 h.The chemical structures of the PI films were investigated using FTIR spectroscopy and the degree of imidization was calculated.Results show that the PI film has a fully imidization.The surface morphology of the films,compared with co-deposited PI films,was observed using AFM,the surface morphology of the PI films would be better by depositing ODA first. |
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| Keywords: | Sequential deposition Monomer Polyimide Freestanding film Surface morphology |
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