平面调制靶的正弦波曲面超精密加工与表征

采用超精密车削技术加工微尺度正弦波调制曲面微结构，解决了尖刃金刚石刀具刃磨和刀具对中等关键技术，研究了进给量、背吃刀量和主轴转速等主要切削参数对铜模板表面粗糙度的影响规律。加工出波长为（20～150）m0.5 m﹑峰谷高度差为（0.2～20）m0.1 m的带正弦波调制曲面。采用原子力显微镜对模板表面轮廓扫描，在20 m20 m的范围内，其表面粗糙度均方根值小于10 nm。将正弦波调制曲面测量结果与理论轮廓进行比较，采用最小二乘寻优算法评定轮廓误差。完成了曲面轮廓的功率谱表征，利用加工的曲面微结构制备了平面调制靶，实现正弦波调制曲面轮廓的精确转移。

Ultra-precision machining and characterizing of sinusoidal surface of surface perturbation target

Modulation surfaces with micro-scaled sinusoidal fluctuation were fabricated utilizing ultra-precision turning techniques. Problems concerning key techniques including needle tip diamond tool sharpening and tool centering were solved. The relations between the copper mould surface roughness and main cutting parameters, based on feed rate, depth of cut and spindle speed, were investigated. Sinusoidal surfaces with of 20-150 μm and amplitudes of 0.2-20 μm were developed, and the dimensional tolerances are ±0.5 μm and ±0.1 μm, respectively. Atomic force microscope measurement shows that the RMS surface roughness in a 20 μm×20 μm area is less than 10 nm. The profile error was assessed by using, the least squares optimization algorithm. Power spectrum analyses of the developed sinusoidal surfaces demonstrate the precise copy of sinusoidal fluctuation from the copper mould surface to the target.