用金刚石车削技术制备EOS实验用铝薄膜和铜薄膜

 具有材料理论密度的金属薄膜对于材料高压状态方程(EOS)研究而言具有重要的意义。本文提出采用金刚石车削技术，利用超精密金刚石车床、金刚石圆弧刀具及真空吸附夹持技术，对纯铝和无氧铜进行端面车削，完成了EOS实验用铝薄膜和铜薄膜的车削加工，实现了薄膜密度接近材料理论密度。精加工工艺参数为：进给量0.001 mm/r，主轴转速3000 r/min，切削深度1 μm。采用Form Talysurf series 2型触针式轮廓仪进行测量，结果表明：铝薄膜、铜薄膜厚度可以达到小于10 μm水平，表面均方根粗糙度小于5 nm，原始最大轮廓峰-谷高度小于50 nm，厚度一致性好于99%。

Fabrication process of aluminum film and copper film used in EOS experiment by diamond turning technology

Metal films with material theoretical density are important to measurement of equation of state under high pressure. In this paper, an aluminum film and a copper film used in EOS(equation of state) experiment are produced by diamond turning technology. Process parameters of finish machining are given, including the feed rate 0.001 mm/r, the spindle rotate speed 3 000 r/min, and the depth of cutting 1 μm. Then the surface roughness is characterized by a Form Talysurf series 2 device. The results indicate that the thickness of both aluminum film and copper film are less than 10 μm, the surface root mean square roughness less than 5 nm, the primary maximum peak to valley height less than 50 nm and the thickness uniformity more than 99%.