4 MV激光触发多级多通道开关特性

报道了4 MV激光触发多级多通道开关的结构设计和初步的实验结果及分析。该开关采用轴向聚焦触发方式，设计为匀场结构，采用场调整环与匀压环调整开关间隙电场分布，电极-绝缘子序列采用堆栈结构替代榫接结构，独立定位、紧固。实验结果表明:4 MV激光触发多级多通道开关的自击穿电压偏差小于5%，自击穿电压与工作气压呈良好的线性关系；触发延迟时间约25 ns，极差小于±2.5 ns，抖动1.5 ns；等工作电压-气压比条件下，随着气压和工作电压的上升触发延迟时间及其抖动趋向下降。

10 kV high voltage pulse power supply for plasma surface modification

The series connected circuit structure with synchronous drive technology,which is composed of 12 relatively independent pulse power supplies,is used in order to acquire 10 kV high voltage pulse.The design is modularized and different voltage output can be realized through varying the number of pulse power units.The output parameters of the power supply are as follows: the peak voltage 0.1~10.0 kV,the pulse frequency 0.2~2.0 kHz,the duty cycle 5%~30%,the pulse current magnitude 20 A,and the pulse power 200 kW.Experiments have demonstrated that the power supply is stable and reliable in plasma surface modification processes.