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13.9nm软X射线激光用大面积多层膜分束镜研制
引用本文:王占山,张众,王风丽,吴文娟,王洪昌,秦树基,陈玲燕.13.9nm软X射线激光用大面积多层膜分束镜研制[J].强激光与粒子束,2004,16(9):1089-1091.
作者姓名:王占山  张众  王风丽  吴文娟  王洪昌  秦树基  陈玲燕
作者单位:同济大学 精密光学工程技术研究所,上海 200092
基金项目:国家自然科学基金资助课题(69989801,60178021,60378021),国家863计划项目资助课题
摘    要: 基于分束镜反射率和透射率的乘积为衡量标准的原则,设计了13.9nm软X射线激光干涉测量所需的多层膜分束镜,用磁控溅射法在有效面积达10mm×10mm,厚100nm的氮化硅窗口上镀制Mo/Si多层膜,实现了分束镜制作。用表面轮廓仪实测分束镜面形精度达到nm量级,同步辐射反射率计测试表明,分束镜的反射率和透射率乘积约4%。

关 键 词:软X射线  分束镜  多层膜  等离子体诊断
文章编号:1001-4322(2004)09-1089-03
收稿时间:2003/12/22
修稿时间:2003年12月22

Fabrication of the beam splitters with large area for soft X-ray laser applications
WANG Zhan-shan,ZHANG Zhong,WANG Feng-li,WU Wen-juan,WANG Hong-chang,QIN Shu-ji,CHEN Ling-yan.Fabrication of the beam splitters with large area for soft X-ray laser applications[J].High Power Laser and Particle Beams,2004,16(9):1089-1091.
Authors:WANG Zhan-shan  ZHANG Zhong  WANG Feng-li  WU Wen-juan  WANG Hong-chang  QIN Shu-ji  CHEN Ling-yan
Institution:Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092,China
Abstract:The soft X-ray laser Mach-Zehnder interferometer is an important tool to measure the electron densities of a laser-produced plasma near the critical surface. The design of a multilayer beam splitter at 13.9nm for soft X-ray laser Mach-Zehnder interferometer is completed based on the standard of maximizing product of reflectivity and transmission of the beam splitter. The beam splitters which is Mo/Si multilayers on 10mm×10mm area Si_3N_4 membrane are fabricated using the magnetron sputtering. The figure error of the beam splitter has reached the deep nanometer magnitude by using optical profiler and the product of reflectivity and transmission measured by synchrotron radiation is up to 4 %.
Keywords:Soft X-ray  Beam splitter  Multilayer  Plasma diagnostics
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