| 大尺寸硅镜超光滑表面加工的面型控制 |
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| 引用本文： | 焦彤,孙龙,黄润兰,鞠玉玫,韩圣安,桑凤亭.大尺寸硅镜超光滑表面加工的面型控制[J].强激光与粒子束,2000,12(7). |
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| 作者姓名： | 焦彤 孙龙 黄润兰 鞠玉玫 韩圣安 桑凤亭 |
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| 作者单位： | 中国科学院大连化学物理研究所， 大连市110-７信箱，大连 116023 |
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| 摘 要： | 使用机械-化学抛光法加工大尺寸单晶硅可获超光滑表面，但很难保证良好的面型。提出通过采用开圆孔并连续注入抛光剂的方法来避免抛光盘中心蜂窝眼的出现，可以保证得到良好的面型。最后实验达到较好的面型精度，PV值0.268λ，rms值0.065λ。
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| 关 键 词： | 面型 超光滑 单晶硅 表面粗糙度 机械-化学抛光 |
| 收稿时间： | 1900-01-01; |
Super smooth surface figure control for large single crystal silicon mirror |
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| jiao tong,sun long,huang run-lan,ju yu-mei,han sheng-an,sang feng-ting.Super smooth surface figure control for large single crystal silicon mirror[J].High Power Laser and Particle Beams,2000,12(7). |
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| Authors: | jiao tong sun long huang run-lan ju yu-mei han sheng-an sang feng-ting |
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| Institution: | Dalian Institute of Chemical Physics, Academia Sinica， P.O.Box 110, Dalian, 116023 |
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| Abstract: | In Chemical-Mechanical polishing experiments we produced optical quality super smooth surfaces on single crystal silicon, but cannot insure the surface figure. In order to avoid the alveoli and achieve a good optical surface, a continuously adding slurry method with digging four well distributed holes was used and advanced in this article. The best results were obtained as 0.268λ peak to peak surface (its diameter 152.4mm) and rms 0.065λ using this method. |
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| Keywords: | super smooth single crystal silicon roughness chemical mechanical polishing |
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