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脉冲准分子激光淀积薄膜的实验研究
引用本文:刘晶儒,白婷,姚东升,李铁军,王丽戈,袁孝,王晟,叶锡生.脉冲准分子激光淀积薄膜的实验研究[J].强激光与粒子束,2002,14(5):646-650.
作者姓名:刘晶儒  白婷  姚东升  李铁军  王丽戈  袁孝  王晟  叶锡生
作者单位:西北核技术研究所,陕西,西安,710024
基金项目:国家 8 63 80 4主题资助项目
摘    要:利用两种脉宽 (30ns,5 0 0fs)的KrF准分子激光展开了淀积类金刚石薄膜的实验研究 ,并且成功地制备了大面积不含氢成分的HF DLC薄膜 ,运用时空分辨的等离子体发射光谱诊断系统和离子探针系统研究了等离子体特性对薄膜性能的影响。尝试了利用准分子激光制备非晶硅薄膜 ,研究了实验参数对非晶硅薄膜制备的影响 ,并分析了制备具有良好电学和光学性能的非晶硅薄膜的条件

关 键 词:脉冲激光淀积类金刚石薄膜非晶硅薄膜
文章编号:1001-4322(2002)05-0646-05
收稿时间:2002/5/29
修稿时间:2002年5月29日

Study on pulsed excimer laser deposited films
LIU Jing ru,BAI Ting,LI Tie jun,YAO Dong sheng,WANG Li ge,YUAN Xiao,WANG Sheng,YE Xi sheng.Study on pulsed excimer laser deposited films[J].High Power Laser and Particle Beams,2002,14(5):646-650.
Authors:LIU Jing ru  BAI Ting  LI Tie jun  YAO Dong sheng  WANG Li ge  YUAN Xiao  WANG Sheng  YE Xi sheng
Abstract:Pulsed lasers of two different durations (30 ns, 500 fs) are used to deposit Hydrogen free Diamond Like Carbon (DLC) films over large areas. Analysis of DLC films shows remarkable mechanical, optical, electrical, and chemical properties that are close to those of diamond. By optical emission spectroscopy and ion probe, the effects of plasma characteristic on DLC film are on experimentally studied. Amorphous silicon films deposited by PLD are also experimentally studied.
Keywords:pulse laser deposition  DLC film  amorphous film
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