| 实时测量308 nm 激光对薄膜的损伤阈值 |
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| 引用本文： | 高鸿奕,楼祺洪,董景星,丁爱臻.实时测量308 nm 激光对薄膜的损伤阈值[J].强激光与粒子束,1998,10(1). |
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| 作者姓名： | 高鸿奕 楼祺洪 董景星 丁爱臻 |
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| 作者单位： | 中国科学院上海光机所, 上海8002211信箱, 201800 |
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| 基金项目： | 国家863激光技术领域资助 |
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| 摘 要： | 用散射光法, 建立了一套实时监视与测量308nm 激光对全反膜和增透膜的损伤的实验装置。实时观察到了损伤从起始、加深直至饱和的整个过程的波形。用这一装置测量了全反膜和增透膜在308nm 激光作用下的损伤阈值。测得全反膜在0°与45°入射角时的损伤阈值分别为1.7与1.0J/cm2。而增透膜的阈值为1.3J/cm2。
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| 关 键 词： | 激光损伤 薄膜 损伤阈值 |
| 收稿时间： | 1900-01-01; |
MONITORING AND MEASUREMENT OF DAMAGE HRESHOLD ON HR AND AR COATINGS FOR THE 308nm EXCIMER LASER |
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| Gao Hongyi,Lou Qihong,Dong Jingxing,Ding Aizhen.MONITORING AND MEASUREMENT OF DAMAGE HRESHOLD ON HR AND AR COATINGS FOR THE 308nm EXCIMER LASER[J].High Power Laser and Particle Beams,1998,10(1). |
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| Authors: | Gao Hongyi Lou Qihong Dong Jingxing Ding Aizhen |
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| Institution: | Shanghai Institute of Optics and Fine Mechanics; Chinese Academy of Science; Shanghai; 201800 |
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| Abstract: | A set of instrument has been built up by means of the combination of a schlieren with a one dimension array of ultraviolet opticelectrical diode and a simultaneously triggered oscilloscope, which is use in monitoring and measurement the damage state and the threshold on the high reflection (HR) and the anti reflection (AR) coatings under the irradiation of the 308nm excimer laser. By this instrument, the waveforms of the whole damage process which contained the initial, the deepening and the saturated sestages of the damage, have been investigated. The measured damage threshold is about 1.7 J/cm2 at zero incident angle and 1.0 J/cm2 at 45°incident angle for the HR coating, and 1.29 J/cm2 for the AR coating. And also some analysis about the experiment result has been given damage. |
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| Keywords: | laser induced damage HR and AR coatings threshould |
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