光学膜层激光预处理过程研究

 光学元件经过激光预处理后，其抗激光破坏能力最大提高2倍以上，系统研究激光预处理机理和工艺，能安全可靠地提高光学元件损伤阈值，提升高功率激光系统的能量密度。研究了几种sol gel膜、PVD膜在预处理前后膜层表面的变化（损伤形貌）以及损伤阈值的增幅，发现预处理过程膜层仍然发生了一定程度的轻微损伤，这种损伤和膜层本身缺陷、激光参数密切相关，预处理过程可逐步消除膜层缺陷。

Study of laser conditioning process for optical films

Laser conditioning is a process where the damage threshold of the coating is increased or the damage created is minimized so that it does not grow upon further irradiation. It is feasible that the damage threshold be improved safely and the power density sustain by the laser system be stepped up by studying the mechanism and technology of laser conditioning systematically. From the changes of several sol-gel films and PVD films during laser conditioning, some damages occurred. The damages are correlated to defects of the film itself and the beam parameters. It is proved that laser conditioning can eliminate film defects step to step.