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基于子孔径拼接原理检测大口径光学元件
引用本文:云宇,彭勇,田小强,周文超.基于子孔径拼接原理检测大口径光学元件[J].强激光与粒子束,2011,23(7).
作者姓名:云宇  彭勇  田小强  周文超
作者单位:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
摘    要: 为了实现小口径干涉仪对大口径光学元件的低成本、高分辨力检测,可采用子孔径拼接方法。在对拼接算法进行改进的基础上,开发了拼接检测软件;建立了一套拼接检测系统,开展了大口径平面光学元件的子孔径拼接检测实验研究。利用9个60 mm×60 mm子孔径拼接来检测120 mm×120 mm的光学元件,检测结果表明:峰谷值误差为2.37%,均方根值误差仅为0.27%。

关 键 词:大口径光学元件  子孔径拼接  最小二乘法  光学检测
收稿时间:1900-01-01;

Large aperture optical components test based on sub-aperture stitching
Yun Yu,Peng Yong,Tian Xiaoqiang,Zhou Wenchao.Large aperture optical components test based on sub-aperture stitching[J].High Power Laser and Particle Beams,2011,23(7).
Authors:Yun Yu  Peng Yong  Tian Xiaoqiang  Zhou Wenchao
Institution:(Institute of Applied Electronics, CAEP, P. O. Box 919-1012, Mianyang 621900, China)
Abstract:Sub-aperture stitching can be used to measure large aperture optical components with low cost and high resolution by a small aperture interferometer. A program based on the improved sub-aperture stitching algorithm was compiled, and the platform for sub-aperture stitching test was established. The experimental stitching that tested a 120 mm×120 mm optical component by nine 60 mm×60 mm planar sub-apertures was performed. The peak-valley error of test was 2.37% and the root-mean-square error was only 0.27%.
Keywords:sub-aperture stitching  least-square method  optical test
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