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杂质对溶胶-凝胶SiO2薄膜激光损伤的影响
引用本文:章春来,李熙斌,吕海兵,袁晓东,王治国,祖小涛.杂质对溶胶-凝胶SiO2薄膜激光损伤的影响[J].强激光与粒子束,2011,23(5).
作者姓名:章春来  李熙斌  吕海兵  袁晓东  王治国  祖小涛
作者单位:1. 中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900; 2. 电子科技大学 物理电子学院, 成都 610054
基金项目:国家高技术发展计划项目; 中央高校基本科研业务费专项资金项目(ZYGX2009X007)
摘    要: 采用溶胶-凝胶法制备了含有吸收性杂质和非吸收性杂质的SiO2增透膜,采用波长为1 064 nm的激光对其进行了小光斑激光预处理,对比研究了预处理前后的激光损伤差异,研究表明:激光预处理对于洁净的SiO2薄膜影响不大;含10 μm SiO2颗粒杂质的样品微透镜效应很明显,容易成为损伤起始的种子,激光预处理后情况有所改善;含有CeO2颗粒杂质的样品表现出了很强的吸收性质,损伤阈值降低到不足洁净样品的一半。所有样品激光预处理后损伤形貌未发生变化,透光率峰值均有约50 nm的蓝移。

关 键 词:溶胶-凝胶  SiO2增透膜  激光预处理  激光辐照损伤
收稿时间:1900-01-01;

Influence of impurities on laser-induced damage of sol-gel SiO_2 films
Zhang Chunlai,Li Xibin,Lü Haibing,Yuan Xiaodong,Wang Zhiguo,Zu Xiaotao.Influence of impurities on laser-induced damage of sol-gel SiO_2 films[J].High Power Laser and Particle Beams,2011,23(5).
Authors:Zhang Chunlai  Li Xibin  Lü Haibing  Yuan Xiaodong  Wang Zhiguo  Zu Xiaotao
Institution:(1. Research Center of Laser Fusion, CAEP, P. O. Box 919-988-5, Mianyang 621900, China;2. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China)
Abstract:Three kinds of anti-reflective SiO2 films, without impurities, with SiO2 particulate impurities and with CeO2 particulate impurities, were deposited on K9 glass by sol-gel dip-coating method. The influence of impurities on laser-induced damage of films was investigated before and after preconditioning with a 1 064 nm Nd:YAG pulsed laser. No obvious change in morphologies and damage threshold appears for pure films after conditioning. For the films with SiO2 impurities, 10 μm-size SiO2 particles show obvious micro-focusing effect and act as damage-initiating seeds, which can be removed by conditioning. Moreover, the samples with CeO2 impurities have intense absorbing character, and their laser-induced damage threshold is les
Keywords:sol-gel  SiO2 anti-reflective films  laser preconditioning  laser-induced damage  
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