| 光学元件损伤在线检测装置及实验研究 |
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| 引用本文： | 任冰强,黄惠杰,张维新,赵永凯,韩广礼,杜龙龙,王树森,路敦武.光学元件损伤在线检测装置及实验研究[J].强激光与粒子束,2004,16(4):465-468. |
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| 作者姓名： | 任冰强 黄惠杰 张维新 赵永凯 韩广礼 杜龙龙 王树森 路敦武 |
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| 作者单位： | 中国科学院 上海光学精密机械研究所，上海201800 |
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| 基金项目： | 国家863计划项目资助课题 |
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| 摘 要： | 利用暗场成像原理，研制成功一套应用于大型激光装置的光学元件损伤在线检测装置，并在多程放大系统上进行了实验研究。与传统的检测手段相比，该检测装置可以实现对光学系统的在线检测，并可对损伤点的图像进行分析处理，最后提出通过减小像差和扩大检测范围的方法来改进该装置的检测效果。
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| 关 键 词： | 学元件 光学损伤检测 暗场成像技术 |
| 文章编号： | 1001-4322(2004)04-0465-04 |
| 收稿时间： | 2003/5/8 |
| 修稿时间： | 2003年5月8日 |
Online inspection apparatus and experiments on optics damage |
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| REN Bing-qiang,HUANG Hui-jie,ZHANG Wei-xin,ZHAO Yong-kai,HAN Guang-li,DU Long-long,WANG Shu-sen,LU Dun-wu.Online inspection apparatus and experiments on optics damage[J].High Power Laser and Particle Beams,2004,16(4):465-468. |
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| Authors: | REN Bing-qiang HUANG Hui-jie ZHANG Wei-xin ZHAO Yong-kai HAN Guang-li DU Long-long WANG Shu-sen LU Dun-wu |
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| Institution: | Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences，P.O.Box 800 211, Shanghai 201800，China |
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| Abstract: | An online inspection apparatus of optics damage in large scale laser facility is developed applying dark-field imaging technology. Experiments were carried out on a multi-pass amplifier. Optical defects, such as film damage, self-focusing filament and cranny on optical elements are inspected. Experimental results show that this apparatus can be used for online inspection of optics damage. Further improvements. that the image aberration should be decreased and the inspection range be extended are proposed. |
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| Keywords: | Optical elements Inspection of optics damage Dark-field imaging technology Large scale laser facility |
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