Trapezoid mesa trench metal-oxide semiconductor barrier Schottky rectifier: an improved Schottky rectifier with better reverse characteristics |
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Authors: | Li Wei-Yi Ru Guo-Ping Jiang Yu-Long and Ruan Gang |
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Institution: | State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China;State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China;State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China;State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, China |
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Abstract: | An improved structure of Schottky rectifier, called a trapezoid mesa trench metal—oxide semiconductor (MOS) barrier Schottky rectifier (TM-TMBS), is proposed and studied by two-dimensional numerical simulations. Both forward and especially better reverse I—V characteristics, including lower leakage current and higher breakdown voltage, are demonstrated by comparing our proposed TM-TMBS with a regular trench MOS barrier Schottky rectifier (TMBS) as well as a conventional planar Schottky barrier diode rectifier. Optimized device parameters corresponding to the requirement for high breakdown voltage are given. With optimized parameters, TM-TMBS attains a breakdown voltage of 186 V, which is 6.3% larger than that of the optimized TMBS, and a leakage current of 4.3 × 10-6 A/cm2, which is 26% smaller than that of the optimized TMBS. The relationship between optimized breakdown voltage and some device parameters is studied. Explanations and design rules are given according to this relationship. |
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Keywords: | Schottky rectifier pinch-off effect breakdown power device |
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