Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer |
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Authors: | Zhu Teng-Fei Tan Bing-Hui Pan Xue-Feng and Tao Wei-Dong |
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Institution: | College of Science, Ningbo University, Ningbo 315211, China |
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Abstract: | 2D and 3D submicron periodic structures are first
fabricated by red-induced photopolymerization using a common 635~nm
semiconductor laser and specially developed red-sensitive polymer
material. The principle of this new photo-polymer material
fabrication is explained and the absorption spectra of the material
are measured. This fabrication technique allows a deeper penetration
into volume and larger interference irradiation area which is more
than 1~cm2. The optical design, theoretical calculations
and experimental results including diffraction patterns
verifying the formation of periodic structures are presented.
Compared with other fabrication technologies using high-power
lasers, this approach has greatly reduced the demand for laser
apparatus. Therefore, it is much more accessible to most
laboratories and potentially usable in holographic fabrication of
photonic crystals and devices in micro electro-mechanical
systems (MEMS). |
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Keywords: | submicron periodic-structures holographic fabrication red sensitive polymer red-incuced polymerization |
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