High and low frequency relaxation oscillations in a capacitive discharge plasma |
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Authors: | Zhou Zhu-Wen Sungjin Kim Ji Shi-Yin Sun Guang-Yu and Deng Ming-Sen |
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Institution: | Department of Electrical Engineering and Computer
Sciences - 1770 University of California, Berkeley CA 94720,
U.S.A.; Department of physics, Guizhou Educational College, Guiyang 550003, China |
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Abstract: | Both high and low frequency relaxation oscillations have been
observed in an argon capacitive discharge connected to a peripheral
grounded chamber through a slot with dielectric spacers. The
oscillations, observed from time-varying optical emission of the
main discharge chamber, show, for example, a high frequency
(46\,kHz) relaxation oscillation at 100\,mTorr, with an absorbed
power near the peripheral breakdown, and a low frequency
(2.7--3.7\,Hz) oscillation, at a higher absorbed power. The high
frequency oscillation is found to ignite a plasma in the slot, but
usually not in the periphery. The high frequency oscillation is
interpreted by using an electromagnetic model of the slot impedance,
combined with the circuit analysis of the system including a
matching network. The model is further developed by using a parallel
connection of variable peripheral capacitance to analyse the low
frequency oscillation. The results obtained from the model are in
agreement with the experimental observations and indicate that a
variety of behaviours are dependent on the matching conditions. |
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Keywords: | relaxation oscillation capacitive discharge periphery slot |
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