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Study of depth-dependent tetragonal distortion of quaternary AIInGaN epilayer by Rutherford backscattering/channeling |
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| Authors: | G Husnain Chen Tian-Xian Fa Tao Yao Shu-De |
| Institution: | State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China |
| Abstract: | Ⅲ-Ⅴ semiconductors, Rutherford backscattering and channeling, tetragonal distortion |
| Keywords: | Ⅲ-Ⅴ semiconductors Rutherford backscattering and channeling tetragonal distortion |
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