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Microstructure and strain films using in-plane grazing analysis of GaN epitaxial incidence x-ray diffraction |
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| Authors: | Guo Xi Wang Yu-Tian Zhao De-Gang Jiang De-Sheng Zhu Jian-Jun Liu Zong-Shun Wang Hui Zhang Shu-Ming Qiu Yong-Xin Xu Ke and Yang Hui |
| Institution: | [1]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Belting 100083, China [2]Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215125, China |
| Abstract: | in-plane grazing incidence x-ray diffraction, gallium nitride, mosaic structure, biaxialstrain |
| Keywords: | in-plane grazing incidence x-ray diffraction gallium nitride mosaic structure biaxialstrain |
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