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Study of nanocrystalline V02 thin films prepared by magnetron sputtering and post-oxidation
Authors:Luo  Zhen-Fei Wu  Zhi-Ming Xu  Xiang-Dong Wang  Tao Jiang  Ya-Dong
Institution:School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
Abstract:nanocrystal, vanadium dioxide, magnetron sputtering, post-oxidation
Keywords:nanocrystal  vanadium dioxide  magnetron sputtering  post-oxidation
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