| Depth-dependent mosaic tilt and twist in GaN epilayer:An approximate evaluation |
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| 作者姓名： | 张金风 聂玉虎 周勇波 田坤 哈微 肖明 张进成 郝跃 |
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| 基金项目： | supported by the Young Scientists Fund of the National Natural Science Foundation of China(Grant Nos.61306017 and 61204006);the Key Program of the National Natural Science Foundation of China(Grant No.61334002);the Fundamental Research Funds for the Central Universities of China(Grant Nos.K5051225016 and K5051325020) |
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| 摘 要： | An approach based on depth-sensitive skew-angle x-ray diffraction （SAXRD） is presented for approximately evalu- ating the depth-dependent mosaic tilt and twist in wurtzite c-plane GaN epilayers. It is found that （103） plane and （101） plane, among the lattice planes not perpendicular to the sample surface, are the best choices to measure the depth profiles of tilt and twist for a GaN epilayer with a thickness of less than 2 μm according to the diffraction geometry of SAXRD. As an illustration, the depth-sensitive （103）/（101） ω-scans of a 1.4-μm GaN film grown by metal-organic chemical vapor deposition on sapphire substrate are measured and analyzed to show the feasibility of this approach.
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| 关 键 词： | 外延层 扭曲 金属有机化学气相沉积 氮化镓 马赛克 评价 X-射线衍射 蓝宝石衬底 |
Depth-dependent mosaic tilt and twist in GaN epilayer:An approximate evaluation |
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| ZhangJin-Feng,Nie Yu-Hu,Zhou Yong-Bo,Tian Kun,Ha Wei,Xiao Ming,Zhang Jin-Cheng,Hao Yue.Depth-dependent mosaic tilt and twist in GaN epilayer:An approximate evaluation[J].Chinese Physics B,2014(6):569-573. |
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| Authors: | ZhangJin-Feng Nie Yu-Hu Zhou Yong-Bo Tian Kun Ha Wei Xiao Ming Zhang Jin-Cheng Hao Yue |
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| Abstract: | mosaic structure, tilt and twist, skew angle x-ray diffraction, GaN |
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| Keywords: | mosaic structure tilt and twist skew angle x-ray diffraction GaN |
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