In situ infrared spectroscopic study of cubicboron nitride thin film delamination |
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Authors: | Yang Hang-Sheng Zhang Jian-Ying Nie An-Min and Zhang Xiao-Bin |
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Institution: | Department of Materials Science and Engineering, Zhejiang
University, Hangzhou 310027, China |
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Abstract: | This paper investigates the procedure of cubic boron nitride (cBN)
thin film delamination by Fourier-transform infrared (IR)
spectroscopy. It finds that the apparent IR absorption peak area
near 1380\,cm$^{-1}$ and 1073\,cm$^{-1}$ attributed to the B--N
stretching vibration of sp$^{2}$-bonded BN and the transverse
optical phonon of cBN, respectively, increased up to 195{\%} and
175{\%} of the original peak area after film delamination induced
compressive stress relaxation. The increase of IR absorption of
sp$^{2}$-bonded BN is found to be non-linear and hysteretic to film
delamination, which suggests that the relaxation of the turbostratic
BN (tBN) layer from the compressed condition is also hysteretic to
film delamination. Moreover, cross-sectional transmission electron
microscopic observations revealed that cBN film delamination
is possible
from near the aBN(amorphous BN)/tBN interface at least
for films prepared by plasma-enhanced chemical vapour deposition. |
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Keywords: | cubic boron nitride films infrared spectroscopy delamination compressive stress
relaxation |
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