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Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system
作者姓名:孔伟金  沈自才  王淑华  邵建达  范正修  卢朝靖
作者单位:College of Physics Science, Qingdao University, Qingdao 266071, China;Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China;College of Physics Science, Qingdao University, Qingdao 266071, China;Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;College of Physics Science, Qingdao University, Qingdao 266071, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant No.~10804060), Higher Educational Science and Technology Program of Shandong Province of China (Grant No.~J08LI05).
摘    要:This paper reports that SiO2 is selected to fabricate broadband antireflection(AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition.Through accurate control of the graded index of the SiO 2 layer,transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300-1850 nm.Moreover,a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1,resulting in an average damage threshold of 17.2 J/cm2.

关 键 词:broadband  antireflection  coating  graded  index  glancing  angle  deposition
收稿时间:2008-11-24
修稿时间:7/6/2009 12:00:00 AM

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system
Kong Wei-Jin,Shen Zi-Cai,Wang Shu-Hu,Shao Jian-D,Fan Zheng-Xiu and Lu Chao-Jing.Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system[J].Chinese Physics B,2010,19(4):44210-044210.
Authors:Kong Wei-Jin  Shen Zi-Cai  Wang Shu-Hu  Shao Jian-D  Fan Zheng-Xiu and Lu Chao-Jing
Institution:Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China; College of Physics Science, Qingdao University, Qingdao 266071, China; Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract:This paper reports that SiO2 is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO2 layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850~nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2~J/cm$^{2}$.
Keywords:broadband antireflection coating  graded index  glancing angle deposition
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