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High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth
作者姓名:黄社松  牛智川  詹锋  倪海桥  赵欢  吴东海  孙征
作者单位:State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China;The Key Laboratory of Beam Technology and Material Modification of Ministry of Education,\Beijing Normal University, Beijing 100875, China;State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China;State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant No 60625405), and the Special Foundation for State Major Basic Research Program of China (Grant No 2006CB921504).
摘    要:

关 键 词:分子束外延  量子点  两步生长  量子学
收稿时间:2007-04-10
修稿时间:2007-07-04

High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth
Huang She-Song,Niu Zhi-Chuan,Zhan Feng,Ni Hai-Qiao,Zhao Huan,Wu Dong-Hai and Sun Zheng.High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth[J].Chinese Physics B,2008,17(1):323-327.
Authors:Huang She-Song  Niu Zhi-Chuan  Zhan Feng  Ni Hai-Qiao  Zhao Huan  Wu Dong-Hai and Sun Zheng
Institution:State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors,\Chinese Academy of Sciences, Beijing 100083, China; The Key Laboratory of Beam Technology and Material Modification of Ministry of Education,\Beijing Normal University, Beijing 100875, China
Abstract:We develop a modified two-step method of growing high-density and narrow size-distribution InAs/GaAs quantum dots (QDs) by molecular beam epitaxy. In the first step, high-density small InAs QDs are formed by optimizing the continuous deposition amount. In the second step, deposition is carried out with a long growth interruption for every 0.1 InAs monolayer. Atomic force microscope images show that the high-density ($\sim $5.9$\times $10$^{10}$\,cm$^{ - 2})$ good size-uniformity InAs QDs are achieved. The strong intensity and narrow linewidth (27.7\,meV) of the photoluminescence spectrum show that the QDs grown in this two-step method have a good optical quality.
Keywords:molecular beam epitaxy  quantum dots  a modified two-step growth
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