| PVDF压电传感器及敏感单元设计关键技术 |
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| 引用本文： | 张旭,覃双,杨舒棋,彭文杨,赵锋,于君,钟斌.PVDF压电传感器及敏感单元设计关键技术[J].高压物理学报,2020(2):41-47. |
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| 作者姓名： | 张旭 覃双 杨舒棋 彭文杨 赵锋 于君 钟斌 |
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| 作者单位： | 中国工程物理研究院流体物理研究所;中国工程物理研究院研究生部 |
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| 基金项目： | 国防科工局技术基础项目(JSZL2016212C001);科学挑战计划(TZ20118001)。 |
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| 摘 要： | 研究了聚偏二氟乙烯(PVDF)柔性压电传感器敏感单元设计关键技术和工艺。通过传感器敏感单元设计、电极制作、极化和封装研究实现功能,结合动态冲击压缩实验,对自主研制的PVDF传感器在不同压力段进行标定和A类不确定度评价,实验数据的A类不确定度优于10%,说明所研制的PVDF压电传感器精度高、重复性好,能够满足0.3~10.0 GPa动态冲击压力测量应用需求。目前产品设计水平已达到6级,后续将进一步开展更高压段有效性的应用设计、温度补偿效应研究和工程化产品设计。
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| 关 键 词： | PVDF压电传感器 电极制作 极化封装 动态标定 |
Key Design Techniques for PVDF Sensitive Element Used in Dynamic Compression Experiments |
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| ZHANG Xu,QIN Shuang,YANG Shuqi,PENG Wenyang,ZHAO Feng,YU Jun,ZHONG Bin.Key Design Techniques for PVDF Sensitive Element Used in Dynamic Compression Experiments[J].Chinese Journal of High Pressure Physics,2020(2):41-47. |
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| Authors: | ZHANG Xu QIN Shuang YANG Shuqi PENG Wenyang ZHAO Feng YU Jun ZHONG Bin |
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| Institution: | (Institute of Fluid Physics,CAEP,Mianyang 621999,Sichuan,China;The Graduate School of CAEP,Mianyang 621999,Sichuan,China) |
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| Abstract: | This paper introduces key design techniques for PVDF sensitive element used in dynamic compression experiments.Based on the sensitive element design,electrode design,sensitive element polarization and sealing,PVDF dynamic pressure sensors are well design and produced.We also made dynamic experiments in order to calibrate the PVDF sensor.The results show that A-type uncertainty is less than 10%,which can be used in the dynamic pressure range of 0.3–10.0 GPa.We will extend the application to higher pressure range and consider the temperature effects. |
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| Keywords: | PVDF piezo-electric sensor PVDF sensor electrode polarization and sealing dynamic calibration |
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