可集成的高效率InGaAsP相位调制器

GaAs-AlGaAs和InGaAsP-InP体系光电波导调制器已日益引起人们的兴趣。预计它们可以用于高速光通信,相干光通信和激光陀螺。 本文报道一种用耗尽边带传输加反向偏压p-n结结构的高效InGaAsP/InP相位调制器。该调制器用液相外延、湿法腐蚀和常规工艺制备。这种波导禁带波长1.3μm的调制器在1.52μm波长观察到很大的相位移效率,对TE模和TM模来说分别为60°/V·mm和43°/V·mm。

HIGHLY EFFICIENT InGaAsP/InP PHASE MODULATOR FOR INTEGRATED OPTOELECTRONICS

There has been an increasing interest in the development of optical waveguide modulator in GaAs-AlGaAs or InGaAsP-InP system. Applications are expected in high speed optical communications, coherent light wave systems and laser gyroscope.In this paper, we report a righly efficient InGaAsP/InP phase modulator using depletion edge translation in a reverse biased p-n junction. The device was fabricated by liquid phase epitaxy, wet chemical etching and other conventional processings. In the waveguide modulators with bandgap of 1.3 pm wavelength, the largest phase shifting efficiency of 60?/V.mm and 43?/ V.mm for the TE and.TM modes, respectively, for a reverse-biased structure was observed at 1.52 uuuuum wave-iength.