| 基于深刻蚀SiO2脊型波导的紧凑型多模干涉功分器 |
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| 引用本文： | 陈挺,戴道锌.基于深刻蚀SiO2脊型波导的紧凑型多模干涉功分器[J].光子学报,2008,37(11):2150-2154. |
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| 作者姓名： | 陈挺 戴道锌 |
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| 作者单位： | 浙江大学,现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310058 |
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| 基金项目： | 国家自然科学基金，浙江省研究基金 |
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| 摘 要： | 采用深刻蚀SiO2脊型波导,利用其弯曲半径小的优点,设计了一种紧凑型1×2多模干涉功分器.在输入/输出波导与多模干涉区域之间引入了逆向锥形波导,有效地减小了输出波导间距,从而减小了多模干涉区域宽度及其长度,进一步实现了多模干涉器件的小型化(仅为150 μm×20 μm).并采用三维束传播方法对多模干涉区域及输入/输出波导中的光场传输进行了模拟仿真,得到了一组最优参量设计值,从而实现其结构优化.
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| 关 键 词： | SiO2波导 锥形波导 深刻蚀 多模干涉 |
| 收稿时间： | 2007-06-07 |
| 修稿时间： | 2007-08-16 |
Design of a Compact Multimode Interference Power Splitter Based on Deeply-etched SiO_2 Ridge Waveguide |
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| CHEN Ting,DAI Dao-xin.Design of a Compact Multimode Interference Power Splitter Based on Deeply-etched SiO_2 Ridge Waveguide[J].Acta Photonica Sinica,2008,37(11):2150-2154. |
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| Authors: | CHEN Ting DAI Dao-xin |
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| Institution: | CHEN Ting,DAI Dao-xin(Center for Optical , Electromagnetic Research,State Key Laboratory for Modern Optical Instrumentation,Zhejiang University,Hangzhou 310058,China) |
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| Abstract: | Based on deeply-etched SiO2 ridge waveguides which support sharp bendings,a compact multimode interference (MMI) power splitter was designed.By using inverse tapers introduced between the input/output waveguides and the MMI section,the width of input/output waveguides is reduced effectively,which reduce the separation between output waveguides effectively.With such a design,the width and the length of the MMI section are reduced further (only about 150 μm×20 μm).The MMI section and the input/output sections are optimized with the results of a set of optimized parameters by simulating the light propagation with a three-dimensional beam-propagation method (3D-BPM). |
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| Keywords: | SiO2 waveguide Tapered waveguide Deeply-etched Multimode interference |
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