| 双成象单元扫描隧道显微镜与原子尺纳米计量技术 |
| |
| 引用本文： | 章海军,吴兰.双成象单元扫描隧道显微镜与原子尺纳米计量技术[J].光子学报,1998,27(10):886-889. |
| |
| 作者姓名： | 章海军 吴兰 |
| |
| 作者单位： | 浙江大学现代光学仪器国家重点实验室 |
| |
| 摘 要： | 研制了双成象单元扫描隧道显微镜(STM),可同时对参考样品的原子晶格和被测样品扫描成象.计数原子晶格的数目,即可精确测定被测样品图象的尺度,以原子尺方式实现严格的纳米计量.本文介绍双成象单元的STM的原理和仪器系统,讨论原子尺纳米计量的可行性,给出被测样品图象的纳米计量结果.
|
| 关 键 词： | 双成象单元 STM 原子尺 纳米计量 |
| 收稿时间： | 1998-07-28 |
DUAL IMAGING UNIT SCANNING TUNNELING MICROSCOPE FOR NANO METROLOGY BASED ON ATOMIC REFERENCE SCALE |
| |
| Zhang Haijun,Wu Lan,Huang Feng.DUAL IMAGING UNIT SCANNING TUNNELING MICROSCOPE FOR NANO METROLOGY BASED ON ATOMIC REFERENCE SCALE[J].Acta Photonica Sinica,1998,27(10):886-889. |
| |
| Authors: | Zhang Haijun Wu Lan Huang Feng |
| |
| Institution: | State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027 |
| |
| Abstract: | A dual imaging unit scanning tunneling microscope(DIU STM)is developed.It simultaneously scans a reference sample(crystalline lattice)and a test sample by using one single XY scanner.The size of the test sample image can be precisely measured by counting the number of lattices.This article describes the measurement concept and the insturment of DIU STM.The crystalline lattice images of two HOPG chips are scanned by the DIU STM to check the feasibility of nano metrology based on the atomic reference scale.One metrological result of test sample image based on HOPG lattices is provided. |
| |
| Keywords: | Dual imaging unit STM Atomic reference scale Nano metrology |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《光子学报》浏览原始摘要信息 |
| 点击此处可从《光子学报》下载免费的PDF全文 |
