光学移相干涉仪抗振系统的鲁棒控制系统仿真分析

将被动抗振和主动抗振相结合的混合控制技术应用于解决光学移相干涉仪抗振系统的不确定性问题,其中主动抗振采用鲁棒控制策略.该方法克服了由模型和干扰所引起的不确定性,使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰.仿真结果表明,该方法使光学移相干涉仪在振动的干扰下具有较好的鲁棒稳定性和控制准确度.

Simulation Study of Robust Control System for Optical Phase-Shifting Interferometer Vibration Isolation System

The hybrid control technology of the active vibration isolation and the passive vibration isolation is presented to solve the uncertainty of the optical phase-shifting interferometer vibration isolation system.The active vibration isolation exploits the theory of Robust Control,which overcome the uncertainty of model and the disturbance,and make the control system restrain the uncertainty of the model and the disturbance of the vibration.The simulation results prove that this method has good robustness and control precision in the vibration isolation of the optical phase-shifting interferometer.