| 电极形状与紫外探测器灵敏度关系的研究 |
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| 引用本文： | 吕惠民,陈光德,苑进社. 电极形状与紫外探测器灵敏度关系的研究[J]. 光子学报, 2006, 35(7): 1052-1055 |
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| 作者姓名： | 吕惠民 陈光德 苑进社 |
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| 作者单位： | 西安交通大学应用物理系,西安,710049;西安理工大学应用物理系,西安,710048;西安交通大学应用物理系,西安,710049 |
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| 摘 要： | 在传统工艺的基础上，改变电极的形状可以提高氮化镓(GaN)基材料光导型紫外探测器的灵敏度.经过计算可知，虽然三棱形电极可以使探测器有效受光率提高100％，但工艺复杂，难以实现；而半圆柱形电极虽然使氮化镓薄膜有效受光率仅提高20％左右，但工艺简单，便于加工.
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| 关 键 词： | 紫外探测器 电极 加工工艺 |
| 收稿时间： | 2005-02-19 |
| 修稿时间： | 2005-02-19 |
The Relation Between The Electrode Shape and The Sensitivity of Photoconductive Ultravidet Detectors |
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| Lü Huimin,Chen Guangde,Yuan Jinshe. The Relation Between The Electrode Shape and The Sensitivity of Photoconductive Ultravidet Detectors[J]. Acta Photonica Sinica, 2006, 35(7): 1052-1055 |
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| Authors: | Lü Huimin Chen Guangde Yuan Jinshe |
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| Affiliation: | (1 Department of Applied Physics, Xi’an Jiaotong University, Xi’an 710049 )
(2 Department of Applied Physics, Xi’an University of Technology, Xi’an 710048) |
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| Abstract: | Based on the conventional technology, the sensitivity of GaN-based Photoconductive Ultravidet Detectors is improved by changed electrode shape. According to theoretical calculation, the receivable ultravidet ray intensity of detectors with triangular and half-cylinder electrode is increased by 100% and 20% respectively, and half-cylinder electrode, to triangular electrode extremely difficult processed, be possessed of a simple and easy manufacturing technology. |
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| Keywords: | Ultravidet detectors Electrode Making technology |
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