Mirau相移干涉法测量微透镜阵列面形

基于Mirau相移干涉法，在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源，干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器，通过5步相移法计算待测表面形貌.实验结果表明，基于Mirau相移干涉法对微透镜阵列面形的测量，水平分辨率达到1.1 μm，垂直测量准确度达到6.33 nm，垂直测量范围为5 μm.对于微透镜阵列的面形测量，通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5 μm，然后辅以精密平移机构进行若干次5步相移法测量局部面形，再利用相位重建所得的数据进行拼接和3D轮廓重建，最终得到整个微透镜阵列的精确微表面形貌.

Mirau Phase-shifting Interferometer for Profile Measurement of Microlenses Array

Based on the Mirau phase-shifting interferometer technology,a interferometer system is developed to measure the profile of microlenses array.The light source of the interferometer system is a He-Ne Laser.The interference image system consists of a Mirau interference objective and other optical elements.A piezoelectric transducer (PZT）is used for the phase shifter.The profile of microlenses array is obtained with interferograms by five-step phase-shifting algorithm.The result shows that the horizontal resolution is 1.1 μm,the vertical measurement range is 5 μm and the vertical testing value is accuracy within 6.33 nm of the Mirau phase-shifting interferometer.In the measuring of the profile of microlenses array,the whole array were divided into many micro parts and ensured the maximum high of each part is less than 5 μm.The profiles of each part can be acquired by the Mirau phase-shifting interferometer method with the precise motion unit.The accurate profile of the whole microlenses array was gained by using the data splice and 3D reconstruction technology.