超光滑加工技术中光学元件表面材料的均匀去除

超光滑加工通常是在保证光学元件面型精度不劣化前提下提升其中高频精度.均匀去除是保证超光滑加工过程中光学元件面型精度不劣化的重要途径.本文以四轴三联动小磨头超光滑加工机床为基础,结合Preston假设,研究了四轴三联动超光滑加工机床对光学元件的材料去除特性,发现当机床取某些特定的参量时,通过等值的驻留时间规划即可实现光学元件表面材料的均匀去除.最后,对这些特定的参量进行了对比实验.实验结果验证了理论分析的正确性.

Uniform Removal of the Surface Material of the Optical Components in Ultra-smooth Technology

Accuracy of the intermediate frequency and the high frequency, of the optical components, are enhanced during the ultra-smooth processing, under the premise of non-deterioration of its surface accuracy. The uniform removal is an important way to ensure of non-degradation of the surface accuracy of the optical components during the ultra-smooth processing. On the basis of the four-axis three linkage machine with small grinding heads, used for ultra-smooth processing, combined with the Preston hypothesis, the characteristics of the material removal of the optical components are studied. When the machine takes some specific parameters, uniform removal of the surface material of the optical element can be achieved with equivalent dwell time. Finally, comparison tests are done to test the specific parameters. The test results confirm the results of the theoretical analysis.