| 光学弱相干反射测量系统频谱分析 |
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| 引用本文： | 曾绍群,徐海峰.光学弱相干反射测量系统频谱分析[J].光子学报,1997,26(2):136-139. |
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| 作者姓名： | 曾绍群 徐海峰 |
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| 作者单位： | 华中理工大学光电子系!武汉，430074 |
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| 摘 要： | 本文在弱物体近似下从成象系统角度研究了光学弱相干反射测量术,分析了该技术测量时信号的形成机理.结果表明它相当于一线性平移不变系统,具有高通滤波特性,直接测量的是缺陷分布的高频信息.本文的工作为定量分析测量结果及进一步提高空间分辨率提供了理论依据.
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| 关 键 词： | 光学反射测量术 系统分析 光学检测 |
| 收稿时间： | 1996-03-19 |
SPECTRUM ANALYSIS OF THE OPTICAL LOW-COHERENCE REFLECTOMETRY SYSTEM |
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| Zeng Shaoqun,Xu Haifeng,Liu Xiande, Luo Qingming,Li Zaiguang.SPECTRUM ANALYSIS OF THE OPTICAL LOW-COHERENCE REFLECTOMETRY SYSTEM[J].Acta Photonica Sinica,1997,26(2):136-139. |
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| Authors: | Zeng Shaoqun Xu Haifeng Liu Xiande Luo Qingming Li Zaiguang |
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| Institution: | Department of Optoelectronic Engineering, Huazhong University of Science &; Technology, Wuhan, Hubei 430074 |
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| Abstract: | Optical low-coherence reflectometry(OLCR)has been analyzed theoretically as an imaging system upon the weak object approximation. The signal formation mechanism has been studied. It has been proved that the OLCR system behaves as a linear shift invariance system and performs like a high-pass filter. High spatial frequency structures of the defects are detected directly. This research will provide theoretical basis for analyzing the measuring results of the unknown structure quantitatively and increasing the spatial resolution. |
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| Keywords: | Optical reflectometry System analysis Optical testing |
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