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用矩阵条件数求解相移最佳采样方式
引用本文:惠梅,王东生,邓年茂,李庆祥,徐毓娴.用矩阵条件数求解相移最佳采样方式[J].光子学报,2003,32(4):477-480.
作者姓名:惠梅  王东生  邓年茂  李庆祥  徐毓娴
作者单位:1. 清华大学,精密仪器与机械学系,精密测试技术与仪器国家重点实验室,北京100084
2. 中国科学院西安光学精密机械研究所,西安,710068
基金项目:国家自然科学基金资助项目 (批准号 :5 9975 0 5 2 )
摘    要:应用相移干涉术测量物体相位时,相移量与相移帧数存在着最佳取值问题,即最佳采样方式,它决定着系统抗扰动和降低误差的能力.用系数矩阵的条件数衡量相位测量误差矩阵与强度探测误差矩阵方程的性态,即光强方程组对扰动的敏感程度,经数学推导及论证,得出结论:当系数矩阵为正交矩阵时,相位计算的误差最小,或者说在等间距满周期采样情况下,具有最强的抗噪音能力.在推导出最佳采样方式后,对系数矩阵的条件数与采样方式之间的关系进行了计算机模拟,并给出了模拟曲线.

关 键 词:相移干涉术  矩阵条件数  采样方式
收稿时间:2002/4/25
修稿时间:2002年4月25日

The Solution of Best Sampling Manner in Phase-shifting Interferometry Based on Matrix Condition Number
Hui Mei,Li Qingxiang,Deng Nianmao,Wang Dongsheng,Xu Yuxian.The Solution of Best Sampling Manner in Phase-shifting Interferometry Based on Matrix Condition Number[J].Acta Photonica Sinica,2003,32(4):477-480.
Authors:Hui Mei  Li Qingxiang  Deng Nianmao  Wang Dongsheng  Xu Yuxian
Institution:1. Department of Precision Instrument and Mechanics, Tsinghua University, Beijing 100084;
2. Xi′an Institute of Optics and Precision Mechanics, CAS, Xi′an 710068
Abstract:This paper searches after what sampling method can get the more accurate phase value when existing experiment error and disturbance in phase-shifting interferometry, namely searches after the best value of phase-shifter and phase-shifting frame. The character of matrix equation of phase measurement error and intensity detection error is scaled in this paper, which is based on condition number of coefficient matrix according to matrix theory. Math demonstration deduced when coefficient matrix is perpendicularity matrix, equal sampling interval within a full cycle brings lest error of phase computation, which is of best noise resistance ability. This sampling method is the best sampling method. The numerical value simulation of coefficient matrix and sampling method relation is carried on, and simulation curve is gived.
Keywords:Phase-shifting interferometry  Matrix condition number  Sampling method  
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