| Mo/B4C软X射线多层膜结构特性研究 |
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| 引用本文： | 吕俊霞,马月英,裴舒,陈星旦,曹健林.Mo/B4C软X射线多层膜结构特性研究[J].光子学报,2000,29(5):459-461. |
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| 作者姓名： | 吕俊霞 马月英 裴舒 陈星旦 曹健林 |
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| 作者单位： | 1. 同济大学物理系玻耳固体物理研究所,上海,200092
2. 中国科学院长春光学精密机械研究所应用光学国家重点实验室,长春,130022 |
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| 基金项目： | 国家自然科学基金;863资助项目 |
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| 摘 要： | 在6.7<λ<10.0nm波段选择Mo/B4C作为多层膜材料,并采用磁控溅射法制备出多层膜样品.这些多层膜样品的周期结构为3.35nm～5.52nm.采用X射线衍射仪和透射电镜(TEM)对样品的微观结构进行研究.结构表明,这些多层膜样品的结构质量很高,并有很好的热稳定性.
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| 关 键 词： | Mo/B4C 多层膜 软X射线 |
| 收稿时间： | 1999-09-27 |
| 修稿时间： | 1999-09-27 |
STRUCTURAL CHARACTERISTIC OF Mo/B4C SOFT X-RAY MULTILAYER MIRRORS |
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| Lu Junxia,Ma Yueying,Pei Shu,Chen Xingdan,Cao Jianlin.STRUCTURAL CHARACTERISTIC OF Mo/B4C SOFT X-RAY MULTILAYER MIRRORS[J].Acta Photonica Sinica,2000,29(5):459-461. |
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| Authors: | Lu Junxia Ma Yueying Pei Shu Chen Xingdan Cao Jianlin |
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| Institution: | 1. Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092;2. The State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, Changchun 130022 |
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| Abstract: | The Mo/B4C multilayer system is selected for 6.7<λ<10.0nm X-rays.Mo/B4C multilayers are deposited by magnetron sputtering.The period thicknesses of these samples are from 3.35nm～ 5.52nm.Details in the microstructure of Mo/B4C multilayer samples are revealed using X-ray diffraction and TEM.The results show that these multilayer mirrors have high structural quality and thermal stability. |
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| Keywords: | Mo/B4C Multilayer mirrors Soft X-ray |
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