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| 极坐标激光直写系统原点定位的实验研究 | |
| 引用本文： | 李凤有,谢永军,卢振武,王肇圻.极坐标激光直写系统原点定位的实验研究[J].光子学报,2004,33(10):1163-1165. |
| 作者姓名： | 李凤有 谢永军 卢振武 王肇圻 |
| 作者单位： | 1. 南开大学现代光学研究所,天津,300071;中国科学院长春光机与物理研究所应用光学国家重点实验室,吉林,长春,130022 2. 中国科学院长春光机与物理研究所应用光学国家重点实验室,吉林,长春,130022 3. 南开大学现代光学研究所,天津,300071 |
| 基金项目： | 国家自然科学基金 (6 0 0 780 0 6 )，中科院创新基金资助项目 |
| 摘 要： | 分析了旋转线性光栅法对准光轴与旋转机械轴中心的理论准确度,实验研究了极坐标激光直写系统的原点定位.在极坐标激光直写系统下进行了圆环线条写入实验,得出了原点定位的准确度,原点定位准确度优于0.5 μm,实验与理论定位准确度基本一致. |
| 关 键 词： | 极坐标激光直写系统 坐标原点定位 激光直写 |
| 收稿时间： | 2003-09-16 |
| 修稿时间： | 2003年9月16日 |
Experimental Study on Fixing the Origin of Polar Coordinate Laser Writing Systems |
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.Experimental Study on Fixing the Origin of Polar Coordinate Laser Writing Systems[J].Acta Photonica Sinica,2004,33(10):1163-1165. |
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| Authors: | |
| Institution: | (1 Institute of Modern Optics, Nankai University, Tianjin 3000710 (2 State Key Lab of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics, The Chinese Academy of Sciences, Changchun,Jilin 130031) |
| Abstract: | Based on the method of rotating linear grating,theoretical accuracy of aligning the axis of an optical system to the axis of a rotating mechanical system is analyzed.The experiments of positioning the coordinate origin are developed under polar laser direct writing system. The circular lines written in laser writing lithography and measurement results are obtained. The results show that position accuracy of the origin of polar coordinate is better than 0.5 μm. The experimental accuracy agrees with theoretical accuracy. |
| Keywords: | Polar coordinate laser writing systems Fixing the origin of coordinate Laser direct writing |
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