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溶胶—凝胶工艺提拉法制备二氧化硅增透膜
引用本文:刘晓林,张伟清.溶胶—凝胶工艺提拉法制备二氧化硅增透膜[J].光子学报,1998,27(1):29-33.
作者姓名:刘晓林  张伟清
作者单位:中国科学院上海光学精密机械研究所5室!上海201800
基金项目:国家高技术863-416
摘    要:采用溶胶-凝胶工艺用提拉法在石英基片上制备了具有优良的光学特性、高激光损伤阈值和均匀性良好的多孔二氧化硅单层增透膜和“有机硅-SiO2”双层增透膜系.考察了提拉速率对透射特性的影响,并比较了提拉法和液面下降法对所制备膜层的厚度的影响.透射光谱测量表明,在钕玻璃高功率激光的基频(1060nm)、倍频和三倍频等重要激光波长处均得到较为理想的增透,透射率达到99%以上.

关 键 词:溶胶-凝胶工艺  提拉法  增速膜  SiO2胶体溶液
收稿时间:1997-05-13

PREPARATION OF SILICA ANTIREFLECTIVE COATINGS BY RAISE PROCESS
Liu Xiaolin, Zhang Weiqing, Tang Yongxing, Le Yueqin, Liang Peihui.PREPARATION OF SILICA ANTIREFLECTIVE COATINGS BY RAISE PROCESS[J].Acta Photonica Sinica,1998,27(1):29-33.
Authors:Liu Xiaolin  Zhang Weiqing  Tang Yongxing  Le Yueqin  Liang Peihui
Institution:Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, Shanghai 201800
Abstract:By using the sol-gel process,the single--layer SiO2 and the two layer"organic silicon--SiO2"antireflective coatings have been prepared from colloidal suspensions solution of silica on fused silicasubstrates at room temperature. These porous silica coatings deposited by raise process are ofexecellent optical performance, high laser damage threshold. The influence of raise speed ontransmission is investigated,and the effect of the thickness prepared by raise process and dip process isalso comparaed. The transmission of coatings on fused silica substrates are over 99 % at 355urn, 530umand 1060um.
Keywords:Sol--gel process  Raise method  Antireflective coating  Colloidal silica solution
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