非球面检测中衍射光学补偿器的校准定位研究

在非球面检测中,为了消除衍射光学补偿器的位置偏差.在补偿器的外围设计、制作了位相型反射式菲涅耳波带板作为衍射光学校准器.利用微细加工手段,将补偿器和校准器整体集成在同一片基上.通过位相型反射式菲涅耳波带板的自校准功能,使其衍射光波与参考光波干涉,形成校准干涉条纹.测量时,调节校准干涉条纹成为最简单的形式,即可校正补偿器的离焦、偏心和倾斜误差,实现位置的精确校准.实验中,得到了近似零校准干涉条纹,有效地消除了补偿器的装调误差对测量的影响.

Alignment of Diffractive Optical Compensator Used for Aspheric Test

In order to eliminate the influence of the misalignment error of compensator on aspheric test,phase reflective Fresnel zone plate(PRFZP),a kind of diffractive optical regulator,was designed and fabricated surrounding the pattern of compensator.With the help of very large scale integration (VLSI) facilities,compensator and regulator were integrated on the same substrate.Because of the self-alignment function of PRFZP,the wavefront reflected by PRFZP interfered with the reference wavefront and the alignment interference pattern was formed.During the test,the position of compensator could be fine adjusted by adjusting the defocus,bias and tilt misalignments to make the interference pattern in the simplest form.Through fine adjustment,an approximately zero alignment interference pattern was obtained which demonstrated that the misalignment errors of compensator were effectively eliminated.