三分量光弹波导混合集成加速度传感器

三分量光弹波导M-Z干涉型集成加速度传感器的研究,为高频高精度地震勘探提供集成化的高精度传感器.利用光弹原理,分析了光弹效应检测任意方向加速度的原理.在X切Y传LiNbO3晶体上,设计制作了光波导双M-Z干涉仪及各集成器件：波导相位调制器、波导偏振器.三分量光弹波导M-Z干涉型集成加速度传感器测试表明：该传感器动态范围宽、线性性好.主要参数为：相位灵敏度达1.81×10－4Rad/m·s－2;工作频带3~1506(Hz).

Three-component Hybrid-integrated Optical Acceleration Seismic Geophone Based on Photoelastic Waveguide

In order to provide a high resolution wide band geophone for three-dimensional seismic geophone, the three-component hybrid-integrated optical acceleration seismic geophone is designed. Analysing the photoelastic effect of LiNbO_3 waveguide applied arbitrary-direction acceleration. The Mach-Zehnder interferometer is realized by symmetrical Y-branching waveguide,waveguide phase modulator and two waveguide polarizers, which are monolithically integrated on an X-cut, Y-propagating LiNbO_3 substrate. The results reveal that the accelerometer has wide band and good linearity. The main design parameters of the geophone system is as following: natural frequency:4300 Hz;phase detection sensitivity Δ/a: 1.81×10 -4 rad/m·s -2 ;work frequency range: 3~1506 Hz..