| 一种MEMS可调光衰减器性能测试及动态响应分析 |
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| 引用本文： | 袁野,曹钟慧,鲍俊峰,邹勇卓,吴兴坤.一种MEMS可调光衰减器性能测试及动态响应分析[J].光子学报,2004,33(4):439-442. |
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| 作者姓名： | 袁野 曹钟慧 鲍俊峰 邹勇卓 吴兴坤 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310027;浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心,杭州,310027 |
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| 摘 要： | 一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.
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| 关 键 词： | 微机械(MEMS) 可调光衰减器(VOA) 电火花加工(EDM) 动态响应 |
| 收稿时间： | 2003-05-16 |
| 修稿时间： | 2003年5月16日 |
Measurement and Dynamic Response Analysis on a MEMS Variable Optical Attenuator |
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| Institution: | (State Key Laboratory of Modern Optical Instrumentation, Center for Optical and Electromagnetic Research, Zhejiang University, Hangzhou, 310027) |
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| Abstract: | A novel non-silicon based MEMS variable optical attenuator (VOA) is reported. The VOA is comprised of an EDM micro-machined MEMS structure, in which a miniature mirror is driven electro-magnetically to adjust desired attenuation continuously. The device features an attenuation ranging from 0 to 35 dB corresponding to a controlling voltage of 0～8 V. A response time of 2 ms was measured for the working range and a theoretical analysis of the VOA dynamic response was conducted. A reasonable agreement was obtained between measurement and calculated response time. |
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| Keywords: | MEMS Variable Optical Attenuator EDM Dynamic Response |
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