| GaAs异质结材料BOA光开关特性分析 |
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| 引用本文： | 黄旭涛,江晓清,尹锐,杨建义,王明华.GaAs异质结材料BOA光开关特性分析[J].光子学报,2001,30(2):157-161. |
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| 作者姓名： | 黄旭涛 江晓清 尹锐 杨建义 王明华 |
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| 作者单位： | 浙江大学信息与电子工程系，杭州 310027 |
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| 基金项目： | 国家自然科学基金! (No.698770 1 7，国家重点基础研究发展规划资助项目! (No.G1 9990 3 3 1 0 4 ) |
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| 摘 要： | 本文较为详细地讨论了GaAs异质结材料BOA型光开关的特性;并应用转移矩阵理论和有效折射率法计算和分析了电极结构与器件半波电压和串音度的关系.结果表明:通过优化设计电极的宽度可以获得BOA型光开关最小的半波电压;电极位置的对称性对器件串音度起决定性的影响.采用自对准工艺技术可以比较准确的控制电极的位置.分析表明:要得到<-40dB的串音度,电极位置偏差必须小于0.3μm.
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| 关 键 词： | BOA 转移矩阵理论 自对准工艺 异质结 |
| 收稿时间： | 2000-05-22 |
| 修稿时间： | 2000年5月22日 |
CHARACTERISTICS OF GaAs HETEROSTRUCTURE BOA TYPE OPTICAL SWITCHES |
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| Huang Xutao,Jiang Xiaoqing,Yin Rui,Yang Jianyi,Wang Minghua.CHARACTERISTICS OF GaAs HETEROSTRUCTURE BOA TYPE OPTICAL SWITCHES[J].Acta Photonica Sinica,2001,30(2):157-161. |
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| Authors: | Huang Xutao Jiang Xiaoqing Yin Rui Yang Jianyi Wang Minghua |
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| Institution: | Huang Xutao,Jiang Xiaoqing,Yin Rui,Yang Jianyi,Wang Minghua Department of Information Science & Electronics Engineering,Zhejiang University,Zhejiang Hangzhou 310027 |
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| Abstract: | In this paper,characteristic analysis of GaAs heterostructure BOA type optical switches has been discussed in detail.The relations between extinction ration,half wave voltage and electrode structure has been analyzed and calculated with transfer matrix theory and effective index method.The following conclusions has been made:1)The electrode width can be optimized to get the lowest half wave voltage of BOA type optical switches.2)The symmetry of electrode is crucial for the extinction ration.3)A process named Self adjustable Technics had been proposed to get low extinction ration.Analysis shows:to gain low extinction ration less than -40dB,the offset of electrode position should be less than 0.3 micron. |
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| Keywords: | Bifurcation optic active (BOA) Self adjustable Technics Transfer matrix Heterostructure |
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