| MSLM调制组件的电光性能 |
| |
| 引用本文： | 梁振宪,侯洵.MSLM调制组件的电光性能[J].光子学报,1993,22(4):332-336. |
| |
| 作者姓名： | 梁振宪 侯洵 |
| |
| 作者单位： | 中国科学院西安光学精密机械研究所，中国科学院西安光学精密机械研究所 710068 西安交通大学电气工程系，710068 |
| |
| 摘 要： | 对设计并制作的MgF2+(ZrO2/SiO2)]膜系·LiNbO3·ITO/玻璃结构的MSLM用调制组件的综合电光性能进行了实验测定。结果表明,其反射半波电压VπR为1.2kV±0.1kV,反射率达99%,峰值次级电子发射系数为5.8。用其制作的光导址MSLM具有良好的功能与性能。
|
| 关 键 词： | 光调制 反射谱 次级电子发射 MSLM |
| 收稿时间： | 1992-10-10 |
THE ELECTRICAL AND OPTIC PROPERTIES OF THE MODULATION ASSEMBLY USED IN MSLM |
| |
| Liang Zhenxian,Hou XunXi'an Institute of Optics and Precision Mechanics,Academia Sinica,Xi'an.THE ELECTRICAL AND OPTIC PROPERTIES OF THE MODULATION ASSEMBLY USED IN MSLM[J].Acta Photonica Sinica,1993,22(4):332-336. |
| |
| Authors: | Liang Zhenxian Hou XunXi'an Institute of Optics and Precision Mechanics Academia Sinica Xi'an |
| |
| Institution: | Liang Zhenxian,Hou XunXi'an Institute of Optics and Precision Mechanics,Academia Sinica,Xi'an 710068 |
| |
| Abstract: | A designed and fabricated MgF2+(ZrO2/SiO2)] film · LiNbO3 plate·ITO film/glass window structure, which will be used in a microchannel spatial light modulator as a complete electro-optic modulation assembly, has been electrically and optically characterized. The experimental results indicate that the reflective half-wave voltage KπR is 1.2± 0.1kV, reflectivity is 99% (633nm) and the peak value of secondary electron emission spectroscopy reaches 5.8. The functional experiments of a prototype MSLM device built with it show that this assembly has good electrical and optic properties. |
| |
| Keywords: | Optic modulation Reflection spectroscopy Secondary electron emission |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《光子学报》浏览原始摘要信息 |
| 点击此处可从《光子学报》下载免费的PDF全文 |
