| 玻璃表面层对薄膜光学参数测量的影响 |
| |
| 引用本文： | 顾铮.玻璃表面层对薄膜光学参数测量的影响[J].光子学报,1999,28(5):469-472. |
| |
| 作者姓名： | 顾铮 |
| |
| 作者单位： | 中国科学院上海光学精密机械研究所5室 201800 |
| |
| 摘 要： | 利用p偏振光在镀膜平板玻璃前后表面反射光强比γ与膜层光学参数之间的密切关系,给出了玻璃表面层的光学参数分布。对典型的薄膜系统-单面镀膜与双面镀膜两种情况,理论分析了玻璃表面层对薄膜光学参数测量的影响。实验上对PMTES和SnO2薄膜参数进行了测量,仅当计及玻璃表面层作用时,反射光强比γ的角度调制曲线才与理论拟合结果相吻合.
|
| 关 键 词： | 表面层 p偏振光 反射比 光学参数 |
| 收稿时间： | 1999-02-10 |
INFLUENCE OF GLASS SURFACE LAYERS ON MEASUREMENT OF OPTICAL PARAMETERS OF THIN FILMS |
| |
| Gu Zhengtian,Liang Peihui,Liu Xiaolin,Zhang Weiqing.INFLUENCE OF GLASS SURFACE LAYERS ON MEASUREMENT OF OPTICAL PARAMETERS OF THIN FILMS[J].Acta Photonica Sinica,1999,28(5):469-472. |
| |
| Authors: | Gu Zhengtian Liang Peihui Liu Xiaolin Zhang Weiqing |
| |
| Institution: | Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P. O. Box 800-211, Shanghai 201800 |
| |
| Abstract: | Based on the characteristic of the angular modulation curves of the reflectance ratio γ of p-polarized beam closely related to the films optical parameters,the optical profile of surface layers on K9 glass in investigated.For two typical film systems,in which the film coated on one side or both sides of the glass,it is analyzed the influence of glass layers on the measurement of the optical parameters of the films.Experimentally it is measured the optical parameters of PMTES and SnO2 films.The results indicate that the experimental results coincide well with the theoretical simulation only if the glass surface layers are considered. |
| |
| Keywords: | Surface layer P polarized light Reflectance ratio Optical parameter |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光子学报》浏览原始摘要信息 |
| 点击此处可从《光子学报》下载免费的PDF全文 |
