| 梳状型高线性度一维位敏检测器 |
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| 引用本文： | 黄梅珍,唐九耀,林斌,陈钰清,曹向群.梳状型高线性度一维位敏检测器[J].光子学报,2000,29(8):764-768. |
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| 作者姓名： | 黄梅珍 唐九耀 林斌 陈钰清 曹向群 |
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| 作者单位： | 1. 浙江大学,国家光学仪器工程技术研究中心,杭州,310027;福州大学,电子科学与应用物理系,福州,350002
2. 浙江大学,国家光学仪器工程技术研究中心,杭州,310027 |
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| 摘 要： | 介绍了一种梳状型一维位敏检测器(PSD)的结构,对其工作原理进行了分析.比较测试了这种梳状结构(1mm×12mm)PSD与普通块状型结构(1mm×3mm)PSD的线性度,实验表明:梳状结构的PSD具有极高的线性度(均方根非线性为0.17%F.S)和较小的边缘失真.对影响一维PSD线性度的因素进行了分析,并对结果进行了讨论.
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| 关 键 词： | 位敏检测器 梳状结构 高线性度 |
| 收稿时间： | 1999-12-23 |
| 修稿时间： | 1999－12－23 |
A COMB-TYPE ONE DIMENSIONAL PSD WITH HIGH LINEARITY |
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| Huang Meizhen,Tang Jiuyao,Lin Bin,Chen Yuqing,Cao Xiangqun.A COMB-TYPE ONE DIMENSIONAL PSD WITH HIGH LINEARITY[J].Acta Photonica Sinica,2000,29(8):764-768. |
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| Authors: | Huang Meizhen Tang Jiuyao Lin Bin Chen Yuqing Cao Xiangqun |
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| Institution: | 1. National Research Center of Engineering & Technology for Optical Instrumentation, ZheJiang University, Hangzhou, 310027;2. Electronic Science & Applied Physics Department, Fuzhou University, Fuzhou 350002 |
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| Abstract: | The structure and operation principle of a novel comb-type one dimensional position sensitive detector (PSD) with high linearity were described.The experimental results showed that the non-linearity of a 1mm×12mm comb-type PSD and a conventional block-type PSD were 0.17%F.S.in the range form 80μm to 11980μm and 1.5%F.S.in the range from 160μm to 2860μm,respectively.It also showed that the comb-type one suffered less distortion near the electrodes.The factors influencing the linearity of 1D-PSD were analyzed.The results were discussed. |
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| Keywords: | PSD Comb-structure High linearity |
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