| 氧碘化学激光高反射薄膜的性能研究 |
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| 引用本文： | 王英剑,金永浩,李庆国,范正修.氧碘化学激光高反射薄膜的性能研究[J].光子学报,2003,32(4):402-404. |
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| 作者姓名： | 王英剑 金永浩 李庆国 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海市800-211信箱,201800 |
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| 基金项目： | 863 410资助项目 |
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| 摘 要： | 通过实际测量和理论计算,给出高反射薄膜的散射和吸收数据,分析两种损耗对薄膜性能起的不同作用;同时,还讨论了热处理对薄膜吸收的影响.
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| 关 键 词： | 氧碘化学激光器 反射 散射 吸收 热处理 |
| 收稿时间： | 2002/6/18 |
| 修稿时间： | 2002年6月18日 |
The Characteristics of High Reflection Films Used in COIL System |
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| Wang Yingjian,Jin Yonghao,Li Qingguo,Fan Zhengxiu.The Characteristics of High Reflection Films Used in COIL System[J].Acta Photonica Sinica,2003,32(4):402-404. |
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| Authors: | Wang Yingjian Jin Yonghao Li Qingguo Fan Zhengxiu |
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| Institution: | Wang Yingjian,Jin Yonghao,Li Qingguo,Fan Zhengxiu Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,800-211 Shanghai,Shanghai 201800 |
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| Abstract: | Several kinds of high reflection thin films have been prepared by e-beam gun. The reflectivity, scatter and absorption of these films are measured by spectrophotometer, Zygo profilemeter and STL(surface thermal lens), respectively, then the relationship between reflectivity and losses is discussed. Furthermore, the weak absorption of some high reflection thin films is also measured after annealing. |
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| Keywords: | COIL Reflectivity Absorption Scatter Annealing |
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