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多脉冲激光作用下光学薄膜损伤的累积效应
引用本文:王涛,赵元安,黄建兵,贺洪波,邵建达,范正修.多脉冲激光作用下光学薄膜损伤的累积效应[J].光子学报,2006,35(6):859-862.
作者姓名:王涛  赵元安  黄建兵  贺洪波  邵建达  范正修
作者单位:1. 中国科学院上海光学精密机械研究所光学薄膜技术研发中心,上海,201800;中国科学院研究生院,北京,100039
2. 中国科学院上海光学精密机械研究所光学薄膜技术研发中心,上海,201800
摘    要:研究了高反射膜在多脉冲激光作用下损伤的累积效应.实验中使用1064nm调Q的Nd∶YAG激光器,脉宽是12 ns,频率为10 Hz.实验发现:高反射膜的损伤阈值随辐照脉冲数增加而降低,表现出明显的累积效应.通过对损伤阈值和损伤概率以及辐照次数的统计性研究,并结合单脉冲辐照的结果,说明了存在于薄膜中微小的缺陷参与了多脉冲激光对薄膜的损伤过程,得到了制备IBS高反射膜的损伤阈值和照射次数的关系式,用Nomarski偏光显微镜观察了实验过程中样品的损伤形貌,发现是典型的缺陷损伤.

关 键 词:Ta2O5/SiO2  介质反射膜  累积效应  单脉冲  多脉冲  损伤阈值
收稿时间:2005-03-22
修稿时间:2005-05-19

Accumulation Effect of Multi-shot Laser-induced Damage to Optical Coatings
Wang Tao,Zhao Yuanan,Huang Jianbing,He Hongbo,Shao Jianda,Fan Zhengxiu.Accumulation Effect of Multi-shot Laser-induced Damage to Optical Coatings[J].Acta Photonica Sinica,2006,35(6):859-862.
Authors:Wang Tao  Zhao Yuanan  Huang Jianbing  He Hongbo  Shao Jianda  Fan Zhengxiu
Institution:(1 R&D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics,
Chinese Academy of Sciences,Shanghai 201800 )
(2 Graduate School of the Chinese Academy of Science, Beijing 10039)
Abstract:Accumulation effect of multi-shot laser-induced damage to optical coatings was investigated. Laser damage testing was performed at 1064 nm with nanosecond pulses at a pulse length of 12 ns, using an accurate and reliable measurement system. Damage threshold and the number of shots were studied by a statistical method. Comparing the case of single-shot with multi-shot laser damage, it is known that microdefects in the optical coatings were responsible for multiple pulses damage to mirrors. The damage mechanism was used to explain the damage process. The expression for the damage threshold and the number of shots was founded. Nomarski microscope was employed to observe laser-induced damage morphology after laser irradiation.
Keywords:Ta_2O_5/SiO_2 dielectric mirrors  Accumulation effect  Single-shot  Multi-shot  Damage threshold
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