| 用分光光度法研究非晶硅薄膜的光学性质 |
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| 引用本文： | 方晓玲,高斐,刘伟,王建军,晏春愉,张佳雯.用分光光度法研究非晶硅薄膜的光学性质[J].光子学报,2008,37(9):1825-1828. |
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| 作者姓名： | 方晓玲 高斐 刘伟 王建军 晏春愉 张佳雯 |
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| 作者单位： | 陕西师范大学,物理学与信息技术学院,西安,710062 |
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| 摘 要： | 提出了一种测量薄膜透射光谱的方法.该方法用自制的夹具改进了分光光度计,保证了在测量大小不同的样品时参考光的强度和入射到待测样品上光的强度相同.利用改进后的分光光度计测量了沉积在玻璃衬底上非晶硅薄膜的透射光谱,并对透射光谱进行了拟合和计算,确定出非晶硅薄膜的光学常量和厚度.
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| 关 键 词： | 分光光度计 非晶硅薄膜 折射率 吸收系数 |
| 收稿时间： | 2007-05-28 |
| 修稿时间： | 2007-07-26 |
Optical Properties of Amorphous Silicon Film by Spectrophotometry |
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| FANG Xiao-ling,GAO Fei,LIU Wei,WANG Jian-jun,YAN Chun-yu,ZHANG Jia-wen.Optical Properties of Amorphous Silicon Film by Spectrophotometry[J].Acta Photonica Sinica,2008,37(9):1825-1828. |
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| Authors: | FANG Xiao-ling GAO Fei LIU Wei WANG Jian-jun YAN Chun-yu ZHANG Jia-wen |
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| Abstract: | A method for measuring transmission spectrum of thin films is presented.The spectrophotometer was improved using a clamp,which ensures the same intensities for the reference light and the sample light when the samples with different sizes were measured.Transmission spectrum of a-Si∶H film were measured by the modified spectrophotometer.The optical constants and thickness are obtained by spectrum curve fitting. |
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| Keywords: | Spectrophotometer Amorphous silicon film Refractive index Absorption coefficient |
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