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1.5 μm Ti:LiNbO3电光波导强度调制器
引用本文:张伯华,高福斌,金锋.1.5 μm Ti:LiNbO3电光波导强度调制器[J].光子学报,1990,19(2):199-204.
作者姓名:张伯华  高福斌  金锋
作者单位:北方交通大学,中国科学院长春物理研究所,中国科学院长春物理研究所 硕士研究生
摘    要:用钛内扩散技术和常规光刻手段,研制出1.5μmLiNbO3电光波导强度调制器。它由单模波导非对称Mach-Zehnder干涉仪和三电极共平面波导组成。干涉仪的两个臂长相差波导波长的四分之一,使器件在最佳线性点工作,无需外加电偏压。集总调制和行波调制的理论带宽分别为1GHz和7.8GHz。对于集总器件,测量了调制特性,半波电压为9.5V,调制带宽为0.7GHz。

关 键 词:电光波导强度调制器  单模波导非对称Mach-Zehnder干涉仪  三电极共平面波导

1.5μm Ti:LiNbO3 ELECTROOPTIC WAVEGUIDE INTENSITY MODULATOR
Zhang Bohua,Gao Fubin,and Jin Feng.1.5μm Ti:LiNbO3 ELECTROOPTIC WAVEGUIDE INTENSITY MODULATOR[J].Acta Photonica Sinica,1990,19(2):199-204.
Authors:Zhang Bohua  Gao Fubin  and Jin Feng
Institution:Changchun Institute of Physics, Academia Sinica
Abstract:A 1.5μm LiNbO3 electrooptic waveguide intensity modulator has been developed by using Titanium indiffusion technique and common photolithographic method. It consists of a single-mode waveguide asymmetric Mach-Zehnder interferometer and a three-electrode coplanar waveguide. Two arms of the interferometer are different in length by one-quarter of a guide wavelength, allowing the device to operate at its optimal linearity point without external electrical bias. Theoretical bandwidths for lumped modulation and traveling-wave modulation are 1GHz and 7.8GHz, respectively. For the lumped device, modulation properties have been measured, its half-wave Voltage is 9.5V, and modulation bandwidth is 0.7GHz.
Keywords:Electrooptic waveguide intensity modulator  Single-mode waveguide asymmetric Mach-Zehnder interferometer  Three-electrode coplanar waveguide    
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