| 激光干涉测长未对准误差分析 |
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| 引用本文： | 杨新刚,黄玉美.激光干涉测长未对准误差分析[J].光子学报,2010,39(2):311-315. |
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| 作者姓名： | 杨新刚 黄玉美 |
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| 作者单位： | 西安理工大学,机械与精密仪器工程学院,西安,710048 |
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| 摘 要： | 分析了激光干涉测长原理,建立了测长光路中角锥棱镜的光线偏移模型及内部光程模型,推导了忽略直线度误差及角度误差的未对准误差对定位误差测量结果影响关系的简洁表达式,进行了定位误差的测定实验,给出了未对准误差的一种定量评估方法.
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| 关 键 词： | 激光测量系统 未对准误差 定位准确度 角锥棱镜 误差分析 |
| 收稿时间： | 2009-03-23 |
| 修稿时间： | 2009-06-25 |
Misalignment Error Anglysis in Laser Interference Length Measurement |
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| YANG Xin-gang,HUANG Yu-mei.Misalignment Error Anglysis in Laser Interference Length Measurement[J].Acta Photonica Sinica,2010,39(2):311-315. |
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| Authors: | YANG Xin-gang HUANG Yu-mei |
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| Institution: | School of Machinery and Precision Instrument Engineering;Xi'an University of Technology;Xi'an 710048;China |
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| Abstract: | Based on analysis of laser interference length measurement principle, optical path offset model and length of optical path in cube-corner prism model are given, and a simple expression of influence relationship of misalignment error and positioning error is derived with neglecting of straightness errors and angle errors. Positioning errors measurement experiments are carried out and a quantitative estimation method for misalignment error is given. |
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| Keywords: | Laser measurement system Misalignment error Positioning accuracy Cube-corner prism Error analysis |
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