| 新型原子力显微镜的研制及其应用 |
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| 引用本文： | 张冬仙,章海军,李博,黄峰.新型原子力显微镜的研制及其应用[J].光子学报,2002,31(1):50-54. |
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| 作者姓名： | 张冬仙 章海军 李博 黄峰 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,杭州,310027 |
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| 摘 要： | 研制了一种新型卧式原子力显微镜(AFM)系统.本文介绍卧式AFM的工作原理及其简要结构,讨论反馈控制电路系统的优化设计,阐述Windows/Dos兼容的图象扫描、处理和显示软件.基于原子力曲线的测定,利用AFM对纳米金刚石薄膜和多孔氧化铝进行了扫描检测.实验表明,该AFM系统具有十分良好的图象重复性、稳定性和衬比(度),仪器的横向分辨率优于3nm,纵向分辨率可达1nm,最大扫描范围达到5μm×5μm.这些性能为卧式AFM在更广泛的纳米技术领域的应用奠定了基础.
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| 关 键 词： | 原子力显微镜 卧式 扫描 纳米技术 |
| 收稿时间： | 2001/5/31 |
| 修稿时间： | 2001年5月31日 |
A NEW TYPE OF ATOMIC FORCE MICROSCOPE AND ITS APPLICATIONS |
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| Zhang Dongxian,Zhang Haijun,Li Bo,Huang Feng State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou.A NEW TYPE OF ATOMIC FORCE MICROSCOPE AND ITS APPLICATIONS[J].Acta Photonica Sinica,2002,31(1):50-54. |
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| Authors: | Zhang Dongxian Zhang Haijun Li Bo Huang Feng State Key Laboratory of Modern Optical Instrumentation Zhejiang University Hangzhou |
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| Institution: | Zhang Dongxian,Zhang Haijun,Li Bo,Huang Feng State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou 310027 |
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| Abstract: | A new type of horizontal atomic force microscope (AFM) is developed for applications in nanotechnology.This article provides the basic principle and setup of the horizontal AFM.The optimized feedback control system and the Windows/Dos compatible software system for image scanning and processing are also introduced.Based on the measurement of atomic force curves,images of diamond thin film and porous alumina were successfully scanned by using the AFM.Experiments show that the horizontal AFM is of high repeatability,reliable stability and ideal contrast for image acquisition.The horizontal and vertical resolutions of the system are 3nm and 1nm,respectively,with a maximum scan range of 5μm×5μm.These remarkable characteristics enable the AFM system to be widely applied in the fields of nanotechnology. |
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| Keywords: | AFM Horizontal Scanning Nanotechnology |
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